{"id":3164,"date":"2023-10-12T12:32:41","date_gmt":"2023-10-12T03:32:41","guid":{"rendered":"https:\/\/electbros.com\/?p=3164"},"modified":"2023-09-03T21:15:05","modified_gmt":"2023-09-03T12:15:05","slug":"high-k-metal-gate","status":"publish","type":"post","link":"https:\/\/electbros.com\/high-k-metal-gate\/","title":{"rendered":"HKMG (High-K Metal Gate)"},"content":{"rendered":"<h2>HKMG<\/h2>\n<p>HKMG (High-K Metal Gate)\ub294 \ud2b8\ub79c\uc9c0\uc2a4\ud130\uc758 \uac8c\uc774\ud2b8\ub97c \uad6c\uc131\ud558\ub294 \ubd80\ubd84\uc778 Oxide\uce35 \uc720\uc804\uc728\uc774 \ub192\uc740 \ubb3c\uc9c8\ub85c \ub300\uccb4\ud558\ub294 \uae30\ubc95\uc785\ub2c8\ub2e4.<\/p>\n<p>MOSFET\uc744 \uad6c\uc131\ud558\ub294 Oxide\uce35\uc740 \uc77c\ubc18\uc801\uc73c\ub85c SiO<sub>2<\/sub>\ub97c \uc0ac\uc6a9\ud574\uc654\uc2b5\ub2c8\ub2e4. \uc5ec\ub7ec\uac00\uc9c0 \uc774\uc720\ub4e4\uc774 \uc788\uc9c0\ub9cc \uc0b0\ud654\ub9c9\uacfc \uc811\ucc29\ub825\uc774 \uc6b0\uc218\ud558\uace0, \ub192\uc740 \uc5f4\uc744 \uac00\ud574\ub3c4 \ub179\ub294\uc810\uc774 \ub192\uc544\uc11c \ub0b4\uc131\uc774 \ub9e4\uc6b0 \ub192\uc544\uc11c \uacfc\uac70\uc5d0\ub294 SiO<sub>2<\/sub>\ub97c \uc624\ub798\ub3d9\uc548 \uc0ac\uc6a9\ud588\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\ud558\uc9c0\ub9cc \uc810\uc810 \ud2b8\ub79c\uc9c0\uc2a4\ud130\ub97c \uc791\uac8c\ub9cc\ub4dc\ub294 \uacbd\ud5a5\uacfc \ud568\uaed8 Metal\uacfc Oxide\uce35\ub3c4 \uc774\uc5d0\ub9de\ucd94\uc5b4 \ud06c\uae30\uc640 \uba74\uc801\uc744 \uc791\uac8c\ub9cc\ub4dc\ub294 \uac83\uc774 \uc911\uc694\ud574\uc84c\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\uc774\ub85c\uc778\ud574\uc11c Metal\uacfc\u00a0 Oixde\uce35\uc758 \ub450\uaed8 \ub610\ud55c \ub0ae\uc544\uc9c0\uba74\uc11c \uc544\ub798 \uadf8\ub9bc\uacfc \uac19\uc774 Oxide\uce35\uacfc Metal\uc601\uc5ed\uc744 \uc804\uc790\uac00 Tunneling\ud558\uc5ec \ud1b5\uacfc\ud560 \uc218 \uc788\uc744 \uc815\ub3c4\ub85c \uc587\uc544\uc84c\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\uc774\ub54c \ud2b8\ub79c\uc9c0\uc2a4\ud130 \uc804\uc6d0\uc774 \uaebc\uc838\uc788\ub294 \uc0c1\ud0dc\uc5d0\uc11c \uc804\ub958\uac00 \ud750\ub974\ub294 &#8216;\ub204\uc124\uc804\ub958&#8217;\uac00 \ubc1c\uc0dd\ud558\uc5ec \uc758\ub3c4\uce58\uc54a\uc740 \uc804\uc6d0\uc744 \uc18c\ubaa8\ud558\uace0 \ubd80\uc815\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce58\uac8c \ub418\uc5c8\uc2b5\ub2c8\ub2e4.<\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<h2>Leakage Current<\/h2>\n<p>\uae30\uc874 \ud2b8\ub79c\uc9c0\uc2a4\ud130\ub97c \uacc4\uc18d Scaling\ud558\uc5ec \ud06c\uae30\ub97c \uc904\uc5ec\ub098\uac08 \ub54c \ubc1c\uc0dd\ud560 \uc218 \uc788\ub294 \ub204\uc124\uc804\ub958\uc758 \uc885\ub958\uc5d0\ub294 \uc5ec\ub7ec\uac00\uc9c0\uac00 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\ud558\uc9c0\ub9cc HKMG\uc640 \uad00\ub828\ub41c \uc774\uc288\ub294 Gate\ub85c \ud758\ub7ec\uac00\ub294 \ub204\uc124\uc804\ub958 \uc131\ubd84\uc774\ub77c\uace0 \ub9d0\uc500\ub4dc\ub9b4 \uc218 \uc788\uc2b5\ub2c8\ub2e4. Oxide\uce35\uc758 \ub450\uaed8\uac00 \ub9e4\uc6b0 \uc587\uae30 \ub54c\ubb38\uc5d0 Oixde\uce35\uc744 \uc804\uc790\uac00 \uc591\uc790\uc5ed\ud559\uc801 \ud604\uc0c1\uc5d0 \uc758\ud574\uc11c Tunneling\ud558\uc5ec Gate\ub85c \ud758\ub7ec\ub4e4\uc5b4\uac08 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>&nbsp;<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-3136 aligncenter\" src=\"https:\/\/electbros.com\/wp-content\/uploads\/2023\/09\/gate_leakage.png\" alt=\"\" width=\"417\" height=\"396\" srcset=\"https:\/\/electbros.com\/wp-content\/uploads\/2023\/09\/gate_leakage.png 417w, https:\/\/electbros.com\/wp-content\/uploads\/2023\/09\/gate_leakage-300x285.png 300w\" sizes=\"(max-width: 417px) 100vw, 417px\" \/><\/p>\n<p>&nbsp;<\/p>\n<p>Tunneling\uc740 \uc591\uc790\uc5ed\ud559\uc801 \ud604\uc0c1\uc774\uae30\ub54c\ubb38\uc5d0 \uc778\uac04\uc774 Control\ud558\uae30\ub780 \ub9e4\uc6b0 \uc5b4\ub835\uc2b5\ub2c8\ub2e4. \uc774\ub97c \uadf9\ubcf5\ud558\uae30 \uc704\ud574 \uae30\uc874 SiO<sub>2<\/sub>\ubcf4\ub2e4 \uc808\uc5f0\ub2a5\ub825\uc774 \uc88b\uc740 \ubb3c\uc9c8\uc5d0 \ub300\ud55c \uc5f0\uad6c\uac00 \ud65c\ubc1c\ud788 \uc9c4\ud589\ub418\uc5c8\uc2b5\ub2c8\ub2e4.<\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<h2>Oxide Capacitance<\/h2>\n<p>HKMG\uc5d0\uc11c High-K \uc989, \uc720\uc804\uc728\uc774 \ub192\uc740 \ubb3c\uc9c8\uc744 \ucc3e\ub294 \uac83\uc5d0\ub294 &#8216;Capacitance&#8217;\uc640 \ubc00\uc811\ud55c \uad00\uacc4\uac00 \uc788\uc2b5\ub2c8\ub2e4. Cpacitance\ub294 \uc544\ub798\uc640 \uac19\uc774 \uc2dd\uc744 \uad6c\uc131\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>&nbsp;<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-3167 aligncenter\" src=\"https:\/\/electbros.com\/wp-content\/uploads\/2023\/09\/capacitance.png\" alt=\"capacitance\" width=\"540\" height=\"118\" srcset=\"https:\/\/electbros.com\/wp-content\/uploads\/2023\/09\/capacitance.png 540w, https:\/\/electbros.com\/wp-content\/uploads\/2023\/09\/capacitance-300x66.png 300w\" sizes=\"(max-width: 540px) 100vw, 540px\" \/><\/p>\n<p>&nbsp;<\/p>\n<ul>\n<li>\u03b5<sub>ox<\/sub> : Oxide(\uc0b0\ud654\ub9c9)\uc758 \uc720\uc804\uc728<\/li>\n<li>t<sub>ox<\/sub> : Oixde(\uc0b0\ud654\ub9c9)\uc758 \ub450\uaed8<\/li>\n<\/ul>\n<p>Oxide\uce35\uc758 \ucee4\ud328\uc2dc\ud134\uc2a4\ub294 \uc720\uc804\uc728\uacfc \ub450\uaed8\ub85c \ud45c\ud604\uc774 \uac00\ub2a5\ud569\ub2c8\ub2e4. \uc5ec\uae30\uc11c High-K \ubb3c\uc9c8\uc744 \uc0ac\uc6a9\ud558\uace0\uc790 \ud558\ub294 \ubaa9\uc801\uc740 \uc720\uc804\uc728\uc744 \uae30\uc874\ubcf4\ub2e4 \uc99d\uac00\uc2dc\ucf1c \ub450\uaed8\ub97c \uc870\uae08 \ub354 \uc99d\uac00\uc2dc\ud0a4\uace0\uc790 \ud558\ub294 \uac83\uc785\ub2c8\ub2e4.<\/p>\n<p>\uc544\ub798 \uc2dd\ub4e4\uc744 \ube44\uad50\ud574\ubcf4\uaca0\uc2b5\ub2c8\ub2e4. (\uac00)\uc2dd\uc740 \uae30\uc874 \uc0b0\ud654\ub9c9\uc758 Capacitance\ub97c \ub098\ud0c0\ub0b8 \uac83\uc774\uace0, (\ub098)\uc2dd\uc740 High-K \ubb3c\uc9c8\uc744 \uc0ac\uc6a9\ud55c Capacitance\ub97c \ub098\ud0c0\ub0b8 \uac83\uc785\ub2c8\ub2e4.<\/p>\n<p>&nbsp;<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-3168 aligncenter\" src=\"https:\/\/electbros.com\/wp-content\/uploads\/2023\/09\/HK_capacitance.png\" alt=\"HK_capacitance\" width=\"541\" height=\"180\" srcset=\"https:\/\/electbros.com\/wp-content\/uploads\/2023\/09\/HK_capacitance.png 541w, https:\/\/electbros.com\/wp-content\/uploads\/2023\/09\/HK_capacitance-300x100.png 300w\" sizes=\"(max-width: 541px) 100vw, 541px\" \/><\/p>\n<p>&nbsp;<\/p>\n<p>High-K \ubb3c\uc9c8\uc744 \uc0ac\uc6a9\ud558\uba74 \uc720\uc804\uc0c1\uc218\uc5d0 \ud56d\uc774 \ub354 \ucd94\uac00\ub418\uc5b4 \uc720\uc804\uc728\uc774 \ub354\uc6b1 \ub354 \uc99d\uac00\ud569\ub2c8\ub2e4. \uadf8\ub85c\uc778\ud574\uc11c t<sub>ox<\/sub>\ub97c \uc870\uae08 \ub354 \uc99d\uac00\uc2dc\ud0a4\ub354\ub77c\ub3c4 \uae30\uc874 Capacitance\uc640 \ub3d9\uc77c\ud558\uac70\ub098 \uadf8\ubcf4\ub2e4 \ub192\uc740 \uac12\uc744 \uc720\uc9c0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\" wp-image-3171 aligncenter\" src=\"https:\/\/electbros.com\/wp-content\/uploads\/2023\/09\/HKMG\uad6c\uc870-1.png\" alt=\"HKMG\uad6c\uc870\" width=\"705\" height=\"228\" srcset=\"https:\/\/electbros.com\/wp-content\/uploads\/2023\/09\/HKMG\uad6c\uc870-1.png 745w, https:\/\/electbros.com\/wp-content\/uploads\/2023\/09\/HKMG\uad6c\uc870-1-300x97.png 300w\" sizes=\"(max-width: 705px) 100vw, 705px\" \/><\/p>\n<p>&nbsp;<\/p>\n<p>\uc704 \ud2b8\ub79c\uc9c0\uc2a4\ud130\uc758 \uad6c\uc870\ub97c \ubcf4\uba74 \uc54c \uc218 \uc788\ub4ef, High-K \ubb3c\uc9c8\uc744 \uc0ac\uc6a9\ud588\uc744 \ub54c \uae30\uc874\uc758 Oixde\uce35\ubcf4\ub2e4 \ub354\uc6b1 \ub354 \ud070 \ub450\uaed8\ub85c \uad6c\uc131\ud574\ub3c4 \uc720\uc804\uc728\uc774 \uae30\uc874\ubcf4\ub2e4 \ub354 \ud06c\ub2e4\uba74 Capacitance\uac12\uc744 \ub3d9\uc77c\ud558\uac70\ub098 \uadf8\ubcf4\ub2e4 \ub354 \ud06c\uac8c \uc720\uc9c0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<h2>High-K Metal Gate\uc758 \ub2e8\uc810<\/h2>\n<p>Gate Oxide\ub85c \ud750\ub974\ub294 \ub204\uc124\uc804\ub958\ub97c \ub9c9\uc744 \uc218 \uc788\ub2e4\ub294 \ud070 \uc7a5\uc810\uc774 \uc788\uc9c0\ub9cc HKMG\ub97c \ubb34\uc791\uc815 \uc801\uc6a9\ud560 \uc218 \uc5c6\ub294 \ub2e8\uc810\uc774 \uc874\uc7ac\ud569\ub2c8\ub2e4.<\/p>\n<p>\uadf8 \ub2e8\uc810\uc740 \ubc14\ub85c Silicon\uacfc \uc811\ucc29\ub825\uc774 \uc6b0\uc218\ud55c High-K\ubb3c\uc9c8\uc744 \ucc3e\uac70\ub098 \uc870\ud569\ud558\uae30\uac00 \uc5b4\ub835\ub2e4\ub294 \ub2e8\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>MOSFET\uc740 \uacb0\uad6d Metal\uacfc Oxide\uadf8\ub9ac\uace0 Semiconductor\ub97c \uc801\uc808\ud558\uac8c \uc870\ub9bd\ud558\uc5ec \ud2b8\ub79c\uc9c0\uc2a4\ud130\ub97c \uad6c\uc131\ud558\ub294 \uac83\uc778\ub370, Oxide\uce35\uc5d0 \uc544\ubb34\ub9ac \uc720\uc804\uc728\uc774 \ub192\uc740 \ubb3c\uc9c8\uc744 \uc801\uc6a9\ud55c\ub2e4\uace0 \ud558\ub354\ub77c\ub3c4 Silicon\uacfc \uc798 \ubd99\uc5b4\uc788\uc744 \uc218 \uc5c6\ub2e4\uba74 MOSFET\uc758 \ub3d9\uc791 \uc2e0\ub8b0\uc131\uc5d0 \uc601\ud5a5\uc744 \uc904 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\ub530\ub77c\uc11c High-K \ubb3c\uc9c8\uc774\ub354\ub77c\ub3c4 Silicon\uacfc \uc798 \uacb0\ud569\ud560 \uc218 \uc788\ub294 \ubb3c\uc9c8\uc744 \ucc3e\ub294 \uac83\uc774 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>HKMG HKMG (High-K Metal Gate)\ub294 \ud2b8\ub79c\uc9c0\uc2a4\ud130\uc758 \uac8c\uc774\ud2b8\ub97c \uad6c\uc131\ud558\ub294 \ubd80\ubd84\uc778 Oxide\uce35 \uc720\uc804\uc728\uc774 \ub192\uc740 \ubb3c\uc9c8\ub85c \ub300\uccb4\ud558\ub294 \uae30\ubc95\uc785\ub2c8\ub2e4. MOSFET\uc744 \uad6c\uc131\ud558\ub294 Oxide\uce35\uc740 \uc77c\ubc18\uc801\uc73c\ub85c SiO2\ub97c &hellip;<\/p>\n<p class=\"read-more\"> <a class=\"\" href=\"https:\/\/electbros.com\/high-k-metal-gate\/\"> <span class=\"screen-reader-text\">HKMG (High-K Metal Gate)<\/span> \uae00 \uc77d\uae30<\/a><\/p>\n","protected":false},"author":1,"featured_media":3166,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","footnotes":""},"categories":[10],"tags":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v22.5 - 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